Tag: Etching

How to Build a Computer 35: Anisotropic Etching


Last time we talked about how to make tiny little holes in silicon using harsh acids. Wet etching is fine and all, but sometimes you just can’t make a feature small enough. You’re limited by the aspect ratio. That is, how wide it is versus how tall it is. A post hole has a high aspect ratio because it’s much deeper than it is wide. A strip mine is a pretty low aspect ratio hole. The difficulty with making high aspect ratio holes in your silicon is that your etchant is going to etch down, yes, but it’s also going to etch towards the sides.

Before we get into dry etching there’s one more trick for making an anisotropic (uh, it etches downward quicker than it goes sideways. Literally the word means not-the-same-in-all-directions.) wet etch. What happens if you do your etching with a strong base instead of a strong acid? As it turns out, and for no reason, I’ve managed to determine, a strong base will etch one crystal face preferentially.

How to Build a Computer 34: Etching


We’re moving back from the series on measurement to the whole process of making computer bits out of silicon. Way back, starting with Computers 7, I started a series on patterning; how you can take an idea and draw it small enough that you can apply that pattern to these really tiny circuits. I went over, step by step, each thing you need to do to create the pattern. I skipped entirely the bit where I tell you what, exactly, you do with one of those patterns when you’ve got them. This is the first of a couple of articles that fit, in manufacturing terms, between Computers 15 (Developing), and 16 (Stripping). You develop your pattern on with photoresist, this is how you make it permanent.

We’ll start with etching. Broadly speaking ‘etching’ covers any process where you start with more material and end up with less material. I mean aside from gambling. Let’s say you’ve got your silicon wafer, you want to etch some of that silicon away. To do this we start by burning your wafer. …Okay, perhaps that’s poor phrasing. Put the flamethrower down and I’ll describe what I mean. To protect your silicon wafer from the damage the etching process would do to it we’re going to want to mask it, with a silicon dioxide layer. Heat your wafer up in the presence of oxygen and this happens: