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I know y’all have been waiting eagerly with your wafer in the chamber, the temperature pumped down and your native oxide layer stripped off for me to finish this two-parter. Well, wait no longer! Okay, maybe wait some as you have to find a tank of dichlorosilane to hook up so you have something to epitax onto your wafer. Di-what now?
Dichlorosilane! Or Tri- or Tetra; really anything from SiH4 to SiCl4 works, though I’m told industry generally works with SiCl2H2. Alright, you pump in dichlorosilane gas and react it on the wafer and it puts silicon on top of your silicon. Neat, huh? That’s it! Join us fortnight next for —