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Last time we talked about how to make tiny little holes in silicon using harsh acids. Wet etching is fine and all, but sometimes you just can’t make a feature small enough. You’re limited by the aspect ratio. That is, how wide it is versus how tall it is. A post hole has a high aspect ratio because it’s much deeper than it is wide. A strip mine is a pretty low aspect ratio hole. The difficulty with making high aspect ratio holes in your silicon is that your etchant is going to etch down, yes, but it’s also going to etch towards the sides.
Before we get into dry etching there’s one more trick for making an anisotropic (uh, it etches downward quicker than it goes sideways. Literally the word means not-the-same-in-all-directions.) wet etch. What happens if you do your etching with a strong base instead of a strong acid? As it turns out, and for no reason, I’ve managed to determine, a strong base will etch one crystal face preferentially.More