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How to Build a Computer 37: CVD II, This Time It’s Personal
Last time, if you’ll recall, I discussed the basic idea of a chemical vapor deposition system, and described how you’d use it to deposit silicon onto your wafer. Today we’re following rather directly from that post, where we answer some important questions. Questions like “What if I don’t want to put down silicon? What other things can you offer me?” Well, for starters
SiCl4(g) + 2H2(g) + O2(g) —> SiO2(s) + 4HCl(g) ~900 C